Automatic testing of mass flow controllers for analog and digital MFCs. Up to 250 nominal values are automatically set for the controller being tested and the test values together with the gas pressure and the gas temperature are saved in a log.
Actual values are logged with up to eight precisions mass flow meters.
The specialized model can be set for a measurement value logging accuracy ± 0.5% of the measured value (± 1% of final value).
The gas flow for the nominal value specification can be set from 0 to 100 l/min.
The calibration system is controlled with an external PC
or laptop; the software is included with the calibration system.